Buyers Guide: Electron Microscope Chamber Anticontaminator

Removes Hydrocarbons and Organics in SEMs

XEI Scientific Web Link

XEI Scientific solves hydrocarbon contamination problems in Electron Microscopes and other high vacuum systems by RF plasma (glow discharge) cleaning with EVACTRON® plasma activated oxidation using air as the oxygen source. The Evactron® De-Contamination system produces Oxygen radicals for a fast, chemically reactive, oil and hydrocarbon removal process that is safe for most surfaces. Plasma Cleaning using the Evactron D-C improves scanning electron microscope performance.

Plasma Cleaners for Electron Microscopes

IBSS Group Inc.  Web Link

GV10x DS Asher patented plasma source offers ultra-high efficiency downstream hydrocarbon removal in SEMs, FIBs, and TEMs. The GV/GA bench top version cleans SEM, FIB samples and TEM holders ex-situ.

· 10x faster hydrocarbon removal – An exclusive 5 mTorr plasma generator from 10 to >50 W power creates more O0 density with long mfp yields higher cleaning efficiency.
· Gently oxidizes hydrocarbons into molecules and pumps them out of the chamber. No specimen damage from sputtering or heat.
· Faster Start, Total Control - Easy-to-use software works on any EM eliminating pump system integration. Start using GV10X in two minutes.
· Uninterrupted Specimen Analysis - Want to clean a specimen during analysis? It’s easy. Takes just 5 minutes for GV10X to cycle On/Clean/Off.