Buyers Guide: SPM, AFM, SEM Calibration Standards

SPM Calibration Specimens

Electron Microscopy Sciences Web Link

Calibration of scanning probe microscopes is essential for obtaining accurate critical dimension measurements and diagnosing calibration errors. The standards have a nominal calibrated dimension of 300 or 700nm in one or two dimensions and are manufactured by holographic fabrication on a silicon wafer substrate with a top surface of tungsten film. Traceable, Certified Standards are available.

Calibration tools for AFM and SPM

Ted Pella, Inc. Web Link

Calibration tools for AFM and SPM ranging from simple tip checks, gold calibration kit, calibration patterns to traceable calibration standards.